JPH0315643U - - Google Patents

Info

Publication number
JPH0315643U
JPH0315643U JP7431289U JP7431289U JPH0315643U JP H0315643 U JPH0315643 U JP H0315643U JP 7431289 U JP7431289 U JP 7431289U JP 7431289 U JP7431289 U JP 7431289U JP H0315643 U JPH0315643 U JP H0315643U
Authority
JP
Japan
Prior art keywords
lid
air hole
open container
covers
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7431289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513398Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7431289U priority Critical patent/JPH0513398Y2/ja
Publication of JPH0315643U publication Critical patent/JPH0315643U/ja
Application granted granted Critical
Publication of JPH0513398Y2 publication Critical patent/JPH0513398Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
JP7431289U 1989-06-23 1989-06-23 Expired - Lifetime JPH0513398Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7431289U JPH0513398Y2 (en]) 1989-06-23 1989-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7431289U JPH0513398Y2 (en]) 1989-06-23 1989-06-23

Publications (2)

Publication Number Publication Date
JPH0315643U true JPH0315643U (en]) 1991-02-18
JPH0513398Y2 JPH0513398Y2 (en]) 1993-04-08

Family

ID=31613894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7431289U Expired - Lifetime JPH0513398Y2 (en]) 1989-06-23 1989-06-23

Country Status (1)

Country Link
JP (1) JPH0513398Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7416611B2 (en) 1997-05-09 2008-08-26 Semitool, Inc. Process and apparatus for treating a workpiece with gases
US7163588B2 (en) 1997-05-09 2007-01-16 Semitool, Inc. Processing a workpiece using water, a base, and ozone
US7378355B2 (en) 1997-05-09 2008-05-27 Semitool, Inc. System and methods for polishing a wafer

Also Published As

Publication number Publication date
JPH0513398Y2 (en]) 1993-04-08

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